Inventor
TAKAYOSHI JOJI
JP10 patents
Patents
10 patentsUS11145490B2Oct 12, 2021
Plasma processing method
TOKYO ELECTRON LTD2 citations71
US11404249B2Aug 2, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations67
US11682543B2Jun 20, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US12548744B2Feb 10, 2026
Plasma processing apparatus, control method, and storage medium for suppressing deterioration effects from wear of an edge ring
TOKYO ELECTRON LTD0 citations57
US12562352B2Feb 24, 2026
Prediction method and information processing apparatus for predicting the process result in a plasma etching process
TOKYO ELECTRON LTD0 citations56
US11705374B2Jul 18, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US10546723B2Jan 28, 2020
Plasma processing method
TOKYO ELECTRON LTD0 citations50
US12288678B2Apr 29, 2025
Substrate processing apparatus and substrate transfer position adjustment method
TOKYO ELECTRON LTD0 citations48
US12541837B2Feb 3, 2026
Etching processing system, method of predicting etching quality, and non-transitory storage medium of etching quality prediction storing a program causing a computer to implement a prediction
TOKYO ELECTRON LTD0 citations45
US12033838B2Jul 9, 2024
Plasma processing apparatus and wear amount measurement method
TOKYO ELECTRON LTD0 citations43