Inventor

NAGAHATA HIROSHI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “NAGAHATA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents

US9780037B2Oct 3, 2017

Method of processing target object

TOKYO ELECTRON LTD2 citations71

US12170193B2Dec 17, 2024

Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation program

TOKYO ELECTRON LTD0 citations59

US10676823B2Jun 9, 2020

Processing method and processing apparatus

TOKYO ELECTRON LTD0 citations50

US12288678B2Apr 29, 2025

Substrate processing apparatus and substrate transfer position adjustment method

TOKYO ELECTRON LTD0 citations48

US11669079B2Jun 6, 2023

Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements

TOKYO ELECTRON LTD0 citations46

US10832891B2Nov 10, 2020

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations34

TANAKA KEISUKE

1 patent

US9396911B2Jul 19, 2016

Determination method, control method, determination apparatus, pattern forming system and program

TANAKA KEISUKE2 citations58

AMEMIYA HIROKI

1 patent

US8058585B2Nov 15, 2011

Plasma processing method, plasma processing apparatus and storage medium

AMEMIYA HIROKI0 citations31