Inventor

AITCHISON KENNETH ALLEN

US3 patents

⚠️ This page may combine multiple inventors who share the name “AITCHISON KENNETH ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EDWARDS LTD

2 patents

US8382909B2Feb 26, 2013

Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system

EDWARDS LTD4 citations57

US7638106B2Dec 29, 2009

Method of treating a gas stream

EDWARDS LTD2 citations57

NOVELLUS SYSTEMS INC

1 patent

US5928426AJul 27, 1999

Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors

NOVELLUS SYSTEMS INC468 citations94