Inventor
LEE KYEONG-TAE
US10 patents
⚠️ This page may combine multiple inventors who share the name “LEE KYEONG-TAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7718538B2May 18, 2010
Pulsed-plasma system with pulsed sample bias for etching semiconductor substrates
APPLIED MATERIALS INC109 citations97
US7771606B2Aug 10, 2010
Pulsed-plasma system with pulsed reaction gas replenish for etching semiconductors structures
APPLIED MATERIALS INC22 citations92
US7737042B2Jun 15, 2010
Pulsed-plasma system for etching semiconductor structures
APPLIED MATERIALS INC23 citations92
US7368392B2May 6, 2008
Method of fabricating a gate structure of a field effect transistor having a metal-containing gate electrode
APPLIED MATERIALS INC7 citations72
US10460921B2Oct 29, 2019
High lateral to vertical ratio etch process for device manufacturing
APPLIED MATERIALS INC1 citations70
US11031233B2Jun 8, 2021
High lateral to vertical ratio etch process for device manufacturing
APPLIED MATERIALS INC0 citations59
US7754610B2Jul 13, 2010
Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
APPLIED MATERIALS INC2 citations59
US11955318B2Apr 9, 2024
Ash rate recovery method in plasma strip chamber
APPLIED MATERIALS INC0 citations57