Inventor
DESHMUKH SHASHANK C
US12 patents
⚠️ This page may combine multiple inventors who share the name “DESHMUKH SHASHANK C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7718538B2May 18, 2010
Pulsed-plasma system with pulsed sample bias for etching semiconductor substrates
APPLIED MATERIALS INC109 citations97
US5978202ANov 2, 1999
Electrostatic chuck having a thermal transfer regulator pad
APPLIED MATERIALS INC81 citations95
US7771606B2Aug 10, 2010
Pulsed-plasma system with pulsed reaction gas replenish for etching semiconductors structures
APPLIED MATERIALS INC22 citations92
US7737042B2Jun 15, 2010
Pulsed-plasma system for etching semiconductor structures
APPLIED MATERIALS INC23 citations92
US7122125B2Oct 17, 2006
Controlled polymerization on plasma reactor wall
APPLIED MATERIALS INC25 citations92
US6924088B2Aug 2, 2005
Method and system for realtime CD microloading control
APPLIED MATERIALS INC19 citations92
US5893643AApr 13, 1999
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC37 citations89
US5851926ADec 22, 1998
Method for etching transistor gates using a hardmask
APPLIED MATERIALS INC25 citations89
US7754610B2Jul 13, 2010
Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
APPLIED MATERIALS INC2 citations59