Inventor
HU CHENG-KANG
TW27 patents
⚠️ This page may combine multiple inventors who share the name “HU CHENG-KANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
26 patentsUS10569520B2Feb 25, 2020
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10155369B2Dec 18, 2018
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10714364B2Jul 14, 2020
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11295973B2Apr 5, 2022
Apparatus and method for automated wafer carrier handling
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10889097B2Jan 12, 2021
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11423526B2Aug 23, 2022
Optical inspection of a wafer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11670524B2Jun 6, 2023
Fully automated wafer debonding system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12283506B2Apr 22, 2025
Humidity control device for equipment front end module of semiconductor processing or characterization tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12334373B2Jun 17, 2025
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12322628B2Jun 3, 2025
Apparatus and method for automated wafer carrier handling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12282318B2Apr 22, 2025
Semiconductor wafer cooling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11929271B2Mar 12, 2024
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11915958B2Feb 27, 2024
Apparatus and method for automated wafer carrier handling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11768484B2Sep 26, 2023
Semiconductor wafer cooling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12153433B2Nov 26, 2024
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11334080B2May 17, 2022
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12400313B2Aug 26, 2025
Optical inspection of a wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11954841B2Apr 9, 2024
Optical inspection of a wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11651981B2May 16, 2023
Method and system for map-free inspection of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11120539B2Sep 14, 2021
Topological scanning method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12543526B2Feb 3, 2026
Fully automated wafer debonding system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12346034B2Jul 1, 2025
Method and system of removing particles from pellicle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12125727B2Oct 22, 2024
Wafer transfer system and a method for transporting wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11152238B2Oct 19, 2021
Semiconductor processing stage profiler jig
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10971386B1Apr 6, 2021
Device positioning using sensors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12165906B2Dec 10, 2024
Apparatus and methods for handling semiconductor part carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49