Inventor
NAKASHOYA TAKAHITO
JP3 patents
Patents
3 patentsUS12420307B2Sep 23, 2025
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD0 citations56
US12300518B2May 13, 2025
Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid
TOKYO ELECTRON LTD0 citations41
US11801537B2Oct 31, 2023
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations38