Inventor

CHANG FENG-RU

TW2 patents

Patents

2 patents

US6590295B1Jul 8, 2003

Microelectronic device with a spacer redistribution layer via and method of making the same

TAIWAN SEMICONDUCTOR MFG112 citations94

US6887793B2May 3, 2005

Method for plasma etching a wafer after backside grinding

TAIWAN SEMICONDUCTOR MFG10 citations68