Inventor

KUNO TATSUYA

JP42 patents

⚠️ This page may combine multiple inventors who share the name “KUNO TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUNO TATSUYA

NGK INSULATORS LTD

Member for semiconductor manufacturing apparatus

Wafer placement table

Electrostatic chuck assembly, electrostatic chuck, and focus ring

Electrostatic chuck and method for manufacturing the same

Wafer placement table

Wafer placement table

Wafer placement table

Wafer placement table

Wafer placement table, and member for semiconductor manufacturing apparatus, using the same

Member for semiconductor manufacturing apparatus

Member for semiconductor manufacturing apparatus

Member for semiconductor manufacturing apparatus

Ceramic heater with shaft

Wafer placement table

Wafer placement table

Wafer placement table

Ceramic heater with shaft

Electrostatic chuck

Member for semiconductor manufacturing apparatus

Wafer placement table and method of manufacturing the same

Electrostatic chuck with high insulation performance and electrostatic attraction force

Feeder member and wafer placement table

Member for semiconductor manufacturing apparatus

Wafer placement table

Wafer placement table

Wafer placement table

Member for semiconductor manufacturing apparatus

Wafer placement table

Wafer placement table

Wafer placement table

Electrostatic chuck heater

Wafer placement table with heat dissipation sheet

Wafer placement table

Member for semiconductor manufacturing apparatus

Member for semiconductor manufacturing apparatus

Member for semiconductor manufacturing apparatus

Wafer placement table

Member for semiconductor manufacturing apparatus

Wafer placement table

Wafer placement table

FUJIMI INC

Powder for thermal spray, thermal spray coating film, coating film and roll in molten metal bath

Powder for thermal spray, thermal spray coating film, coating film and roll in molten metal bath