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Inventor
TATEISHI SHIZUKA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “TATEISHI SHIZUKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
1 patent
US7785419B2
Aug 31, 2010
Epitaxial apparatus
SUMCO CORP
5 citations
51
SUMITOMO MITSUBISHI SILICON
1 patent
US6649885B2
Nov 18, 2003
Thermal processing apparatus
SUMITOMO MITSUBISHI SILICON
0 citations
35