Inventor
KARECKI LEGAL REPRESENTATIVE A
US3 patents
Patents
3 patentsUS7361991B2Apr 22, 2008
Closed air gap interconnect structure
IBM67 citations97
US7393776B2Jul 1, 2008
Method of forming closed air gap interconnects and structures formed thereby
IBM26 citations92
US7309649B2Dec 18, 2007
Method of forming closed air gap interconnects and structures formed thereby
IBM33 citations92