Inventor

BHASKARAN VIJAY

US2 patents

Patents

2 patents

US6946065B1Sep 20, 2005

Process for electroplating metal into microscopic recessed features

NOVELLUS SYSTEMS INC60 citations95

US8048280B2Nov 1, 2011

Process for electroplating metals into microscopic recessed features

NOVELLUS SYSTEMS INC24 citations91