Inventor

VLADIMIR PROTOPOPOV

KR3 patents

Patents

3 patents

US10229818B2Mar 12, 2019

Apparatus for monitoring process chamber

SAMSUNG ELECTRONICS CO LTD2 citations70

US10249485B2Apr 2, 2019

Pulsed plasma analyzer and method for analyzing the same

SAMSUNG ELECTRONICS CO LTD2 citations68

US10971343B2Apr 6, 2021

Apparatus for monitoring process chamber

SAMSUNG ELECTRONICS CO LTD0 citations60