Inventor

BARSUKOV YURI

KR2 patents

Patents

2 patents

US10249485B2Apr 2, 2019

Pulsed plasma analyzer and method for analyzing the same

SAMSUNG ELECTRONICS CO LTD2 citations68

US10418250B2Sep 17, 2019

Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method

SAMSUNG ELECTRONICS CO LTD0 citations47