Inventor

ANDE CHAITANYA KRISHNA

NL5 patents

Patents

5 patents

US11231646B2Jan 25, 2022

Pellicle and pellicle assembly

ASML NETHERLANDS BV1 citations70

US12117726B2Oct 15, 2024

Pellicle and pellicle assembly

ASML NETHERLANDS BV0 citations59

US11754918B2Sep 12, 2023

Pellicle and pellicle assembly

ASML NETHERLANDS BV0 citations59

US11567399B2Jan 31, 2023

EUV pellicles

ASML NETHERLANDS BV0 citations55

US11237475B2Feb 1, 2022

EUV pellicles

ASML NETHERLANDS BV0 citations55