Inventor

BLUME MICHAEL

DE3 patents

⚠️ This page may combine multiple inventors who share the name “BLUME MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYS LITHOGRAPHY LTD

2 patents

US6635884B2Oct 21, 2003

Method for directing an electron beam onto a target position on a substrate surface

LEICA MICROSYS LITHOGRAPHY LTD7 citations62

US6774375B2Aug 10, 2004

Method and apparatus for forming a curved polyline on a radiation-sensitive resist

LEICA MICROSYS LITHOGRAPHY LTD4 citations56

SIEMENS NIXDORF INF SYST

1 patent

US5219233AJun 15, 1993

Process for controlling the operation of a print head

SIEMENS NIXDORF INF SYST1 citations44