Inventor
CHEN CHO-CHING
TW3 patents
Patents
3 patentsUS6401361B1Jun 11, 2002
Apparatus and method for drying wafers by a solvent
TAIWAN SEMICONDUCTOR MFG20 citations82
US6652666B2Nov 25, 2003
Wet dip method for photoresist and polymer stripping without buffer treatment step
TAIWAN SEMICONDUCTOR MFG4 citations56
US7392818B2Jul 1, 2008
Slurry dispensing system
TAIWAN SEMICONDUCTOR MFG1 citations47