Inventor
KE ALLEN
TW3 patents
Patents
3 patentsUS11569125B2Jan 31, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11195750B2Dec 7, 2021
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10707123B2Jul 7, 2020
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71