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Inventor
NAKAJIMA WATARU
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “NAKAJIMA WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US11114319B2
Sep 7, 2021
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD
6 citations
71
US7935188B2
May 3, 2011
Vertical thermal processing apparatus and method of using the same
TOKYO ELECTRON LTD
2 citations
58
UNIV SHINSHU
1 patent
US11383378B2
Jul 12, 2022
Grasping apparatus, learning apparatus, learned model, grasping system, determination method, and learning method
UNIV SHINSHU
1 citations
53