Inventor
BAECHLER WERNER
DE4 patents
Patents
4 patentsUS4757689AJul 19, 1988
Cryopump, and a method for the operation thereof
LEYBOLD HERAEUS GMBH & CO KG70 citations94
US4614093ASep 30, 1986
Method of starting and/or regenerating a cryopump and a cryopump therefor
LEYBOLD HERAEUS GMBH & CO KG45 citations90
US4642995AFeb 17, 1987
Damped displacer refrigerating machine
LEYBOLD HERAEUS GMBH & CO KG29 citations89
US4479360AOct 30, 1984
Cryopump
LEYBOLD HERAEUS GMBH & CO KG11 citations71