Inventor

ARAI TETSUJI

JP23 patents

⚠️ This page may combine multiple inventors who share the name “ARAI TETSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ARAI TETSUJI

USHIO ELECTRIC INC

Heating method of semiconductor wafer

Flashlight-radiant apparatus

Light-radiant furnace for heating semiconductor wafers

Method for heating semiconductor wafers by a light-radiant heating furnace

Method for annealing semiconductors with a planar source composed of flash discharge lamps

Heater assembly and a heat-treatment method of semiconductor wafer using the same

Heating method of semiconductor wafer

Light-radiant heating furnace

Ultraviolet irradiation device

Process and device for bonding discs to one another

Method for ashing a photoresist resin film on a semiconductor wafer and an asher

Method for exposing predetermined area of peripheral part of wafer

Plane light source unit and radiant heating furnace including same

Light-radiant furnace

Method of treating photoresists

Method of treating photoresists

Method of treating photoresists

Method for forming a single crystal silicon layer

Apparatus for treating photoresists

Process for determination of blackening of a lamp

Halogen lamp unit

Method of treating photoresists

USHO DENKI

Method of treating photoresists