Inventor
MENG XIANGMING
CN3 patents
Patents
3 patentsUS9841690B2Dec 12, 2017
Method and apparatus for exposure pattern correction and exposure system
BOE TECHNOLOGY GROUP CO LTD0 citations42
US9910356B2Mar 6, 2018
Method of patterning thin films
BOE TECHNOLOGY GROUP CO LTD0 citations33
US10112218B2Oct 30, 2018
Chamber cleaning apparatus and control method thereof
BOE TECHNOLOGY GROUP CO LTD0 citations30