Inventor

LOH LOKKEE

US3 patents

Patents

3 patents

US11834744B2Dec 5, 2023

Ceramic showerheads with conductive electrodes

APPLIED MATERIALS INC2 citations71

US10920319B2Feb 16, 2021

Ceramic showerheads with conductive electrodes

APPLIED MATERIALS INC1 citations71

US11591693B2Feb 28, 2023

Ceramic showerheads with conductive electrodes

APPLIED MATERIALS INC0 citations61