Inventor
LIM JEON SIG
KR4 patents
Patents
4 patentsUS6376303B1Apr 23, 2002
Method of manufacturing a capacitor having oxide layers with different impurities and method of fabricating a semiconductor device comprising the same
SAMSUNG ELECTRONICS CO LTD26 citations89
US6451694B1Sep 17, 2002
Control of abnormal growth in dichloro silane (DCS) based CVD polycide WSix films
SAMSUNG ELECTRONICS CO LTD5 citations60
US6730619B2May 4, 2004
Method of manufacturing insulating layer and semiconductor device including insulating layer
SAMSUNG ELECTRONICS CO LTD2 citations59
US7180129B2Feb 20, 2007
Semiconductor device including insulating layer
SAMSUNG ELECTRONICS CO LTD0 citations49