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Inventor
LEK ALAN
SG
2 patents
Patents
2 patents
US7932152B2
Apr 26, 2011
Method of forming a gate stack structure
CHARTERED SEMICONDUCTOR MFG
8 citations
79
US7022625B2
Apr 4, 2006
Method of fabricating a gate dielectric layer with reduced gate tunnelling current and reduced boron penetration
CHARTERED SEMICONDUCTOR MFG
4 citations
60