P
PatentIndex
Search
Landscape
Sign in
Inventor
SERVINI ADRIAN
US
2 patents
Patents
2 patents
US8647432B2
Feb 11, 2014
Method of making large surface area filaments for the production of polysilicon in a CVD reactor
WAN YUEPENG
2 citations
53
US9683286B2
Jun 20, 2017
Increased polysilicon deposition in a CVD reactor
WAN YUEPENG
0 citations
43