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Inventor
AKIYAMA OSAYUKI
US
4 patents
⚠️ This page may combine multiple inventors who share the name “AKIYAMA OSAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US9771266B2
Sep 26, 2017
Method and apparatus for processing carbon nanotubes
TOKYO ELECTRON LTD
4 citations
70
US10066293B2
Sep 4, 2018
Method of cleaning the filament and reactor's interior in FACVD
TOKYO ELECTRON LTD
0 citations
39
LEE ERIC M
1 patent
US9212420B2
Dec 15, 2015
Chemical vapor deposition method
LEE ERIC M
6 citations
71
MATSUMOTO TAKASHI
1 patent
US8728917B2
May 20, 2014
Carbon nanotube forming method and pre-treatment method therefor
MATSUMOTO TAKASHI
5 citations
70