Inventor
KODAMA TOSHIAKI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KODAMA TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS12440971B2Oct 14, 2025
Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate
TOKYO ELECTRON LTD2 citations74
US12362215B2Jul 15, 2025
Apparatus for transferring substrate and method for transferring substrate
TOKYO ELECTRON LTD3 citations72
US11434087B2Sep 6, 2022
Transfer device, processing system, and transfer method
TOKYO ELECTRON LTD2 citations72
US9620402B2Apr 11, 2017
Alignment apparatus and substrate processing apparatus
TOKYO ELECTRON LTD5 citations70
US12009240B2Jun 11, 2024
Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate
TOKYO ELECTRON LTD1 citations62
US9043020B2May 26, 2015
Method for determining substrate transportation path, substrate transporting apparatus, substrate processing apparatus and computer-readable storage medium storing a program for performing the method
TOKYO ELECTRON LTD2 citations61
US11923222B2Mar 5, 2024
Substrate transfer device and substrate gripping determination method
TOKYO ELECTRON LTD0 citations51
US11850743B2Dec 26, 2023
Transport apparatus, semiconductor manufacturing apparatus, and transport method
TOKYO ELECTRON LTD0 citations51
US9607389B2Mar 28, 2017
Alignment apparatus
TOKYO ELECTRON LTD1 citations51
US12142506B2Nov 12, 2024
Substrate transfer apparatus, substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12461212B2Nov 4, 2025
Substrate processing system and method of estimating height of annular member
TOKYO ELECTRON LTD0 citations46
US12249527B2Mar 11, 2025
Substrate transport apparatus and substrate transport method
TOKYO ELECTRON LTD0 citations43
US10429543B2Oct 1, 2019
Substrate detection apparatus, substrate detection method and substrate processing system
TOKYO ELECTRON LTD0 citations41
US10319622B2Jun 11, 2019
Substrate conveying method and substrate processing system
TOKYO ELECTRON LTD0 citations40
US9776321B2Oct 3, 2017
Posture holding device for holding part
TOKYO ELECTRON LTD0 citations40
US9810905B2Nov 7, 2017
Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD0 citations36