Inventor
DUNDAS CURT
US5 patents
Patents
5 patentsUS6508920B1Jan 21, 2003
Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device
SEMITOOL INC88 citations97
US7102763B2Sep 5, 2006
Methods and apparatus for processing microelectronic workpieces using metrology
SEMITOOL INC22 citations92
US7462269B2Dec 9, 2008
Method for low temperature annealing of metallization micro-structures in the production of a microelectronic device
SEMITOOL INC5 citations73
US7001471B2Feb 21, 2006
Method and apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device
SEMITOOL INC5 citations73
US6994776B2Feb 7, 2006
Method and apparatus for low temperature annealing of metallization micro-structure in the production of a microelectronic device
SEMITOOL INC5 citations62