Inventor
LIN TIEN-JUI
TW4 patents
Patents
4 patentsUS10101047B2Oct 16, 2018
Gas purifier for wafer substrate accommodating unit
GUDENG PREC IND CO LTD7 citations79
US9230839B2Jan 5, 2016
Reticle pod having gas guiding apparatus
GUDENG PREC IND CO LTD2 citations59
US9817306B2Nov 14, 2017
Extreme ultraviolet (EUV) pod having marks
GUDENG PREC IND CO LTD0 citations48
US9786535B2Oct 10, 2017
Wafer transport system and method for operating the same
GUDENG PREC IND CO LTD0 citations46