Inventor
ROBSON MARK TODHUNTER
US5 patents
⚠️ This page may combine multiple inventors who share the name “ROBSON MARK TODHUNTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7723851B2May 25, 2010
Method of fabricating ultra-deep vias and three-dimensional integrated circuits using ultra-deep vias
IBM17 citations90
US7704869B2Apr 27, 2010
Method of fabricating ultra-deep vias and three-dimensional integrated circuits using ultra-deep vias
IBM7 citations71
US7955967B2Jun 7, 2011
Method of fabricating ultra-deep vias and three-dimensional integrated circuits using ultra-deep vias
IBM5 citations60