Inventor

TEGEDER VOLKER

DE5 patents

⚠️ This page may combine multiple inventors who share the name “TEGEDER VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES SC300

1 patent

US6745637B2Jun 8, 2004

Self-supporting adaptable metrology device

INFINEON TECHNOLOGIES SC30013 citations81

INFINEON TECHNOLOGIES AG

1 patent

US6884639B2Apr 26, 2005

Semiconductor wafer pod

INFINEON TECHNOLOGIES AG18 citations76

MOTOROLA INC

1 patent

US6732855B1May 11, 2004

Conveying element and conveyor means for conveying wafer receptacles, and method

MOTOROLA INC9 citations70

PACESETTER AB

1 patent

US5632085AMay 27, 1997

Method for making an electrical contact for a vitreous carbon electrode

PACESETTER AB8 citations70

FRAUNHOFER GES FORSCHUNG

1 patent

US6784445B2Aug 31, 2004

Apparatus for monitoring intentional or unavoidable layer depositions and method

FRAUNHOFER GES FORSCHUNG1 citations49