Inventor
YU YU-JEN
TW5 patents
Patents
5 patentsUS5874333AFeb 23, 1999
Process for forming a polysilicon layer having improved roughness after POCL3 doping
TAIWAN SEMICONDUCTOR MFG7 citations71
US6563154B1May 13, 2003
Polysilicon layer having improved roughness after POCl3 doping
TAIWAN SEMICONDUCTOR MFG2 citations60
US5792701AAug 11, 1998
Conical baffle for semiconductor furnaces
TAIWAN SEMICONDUCTOR MFG4 citations60
US5838716ANov 17, 1998
Leak check procedure for a dry oxidation furnace tube
TAIWAN SEMICONDUCTOR MFG6 citations54
US5961725AOct 5, 1999
Conical baffle for semiconductor furnaces
TAIWAN SEMICONDUCTOR MFG1 citations50