Inventor
AHMAD HAFIZ FAROOQ
US3 patents
Patents
3 patentsUS6740585B2May 25, 2004
Barrier formation using novel sputter deposition method with PVD, CVD, or ALD
APPLIED MATERIALS INC477 citations97
US7416979B2Aug 26, 2008
Deposition methods for barrier and tungsten materials
APPLIED MATERIALS INC95 citations95
US7611990B2Nov 3, 2009
Deposition methods for barrier and tungsten materials
APPLIED MATERIALS INC44 citations94