Inventor

MURAOKA SUNAO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “MURAOKA SUNAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US5913978AJun 22, 1999

Apparatus and method for regulating pressure in two chambers

TOKYO ELECTRON LTD200 citations97

US7993488B2Aug 9, 2011

Microwave plasma processing device and gate valve for microwave plasma processing device

TOKYO ELECTRON LTD4 citations61

KABE YOSHIRO

1 patent

US8318267B2Nov 27, 2012

Method and apparatus for forming silicon oxide film

KABE YOSHIRO1 citations48

MURAOKA SUNAO

1 patent

US8293067B2Oct 23, 2012

Microwave plasma processing device and gate valve for microwave plasma processing device

MURAOKA SUNAO0 citations44