Inventor

SHIBUKI SHUNICHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHIBUKI SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US6749486B2Jun 15, 2004

Chemical-mechanical polishing device, damascene wiring forming device, and damascene wiring forming method

TOKYO ELECTRON LTD7 citations66

IZUHA KYOKO

1 patent

US8490031B2Jul 16, 2013

Method, apparatus and program for adjusting feature dimensions to compensate for planarizing effects in the generation of mask data and manufacturing semiconductor device

IZUHA KYOKO2 citations60

SONY CORP

1 patent

US9435643B2Sep 6, 2016

Presumably defective portion decision apparatus, presumably defective portion decision method, fabrication method for semiconductor device and program

SONY CORP0 citations39

SHIBUKI SHUNICHI

1 patent

US8829635B2Sep 9, 2014

Solid-state imaging device, manufacturing method thereof, electronic apparatus, and semiconductor device

SHIBUKI SHUNICHI0 citations27