Inventor

FLEUROV VLADIMIR

US2 patents

⚠️ This page may combine multiple inventors who share the name “FLEUROV VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

1 patent

US6904073B2Jun 7, 2005

High power deep ultraviolet laser with long life optics

CYMER INC78 citations95

ASML NETHERLANDS BV

1 patent

US9148941B2Sep 29, 2015

Thermal monitor for an extreme ultraviolet light source

ASML NETHERLANDS BV1 citations48