Inventor
MANGAT PAWITTER J S
US8 patents
⚠️ This page may combine multiple inventors who share the name “MANGAT PAWITTER J S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
3 patentsUS6297169B1Oct 2, 2001
Method for forming a semiconductor device using a mask having a self-assembled monolayer
MOTOROLA INC39 citations91
US5899728AMay 4, 1999
Method of forming a lithographic mask
MOTOROLA INC24 citations91
US6124063ASep 26, 2000
Method of forming a semiconductor device utilizing lithographic mask and mask therefor
MOTOROLA INC18 citations77
FREESCALE SEMICONDUCTOR INC
2 patentsUS6986971B2Jan 17, 2006
Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same
FREESCALE SEMICONDUCTOR INC23 citations90
US6797440B2Sep 28, 2004
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device
FREESCALE SEMICONDUCTOR INC3 citations61