Inventor

PHILLIPS STEPHEN M

US3 patents

⚠️ This page may combine multiple inventors who share the name “PHILLIPS STEPHEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CASE WESTERN RESERVE

2 patents

US6610361B1Aug 26, 2003

Multi-layer assemblies with predetermined stress profile and method for producing same

UNIV CASE WESTERN RESERVE29 citations90

US6479166B1Nov 12, 2002

Large area polysilicon films with predetermined stress characteristics and method for producing same

UNIV CASE WESTERN RESERVE47 citations90

LAKAMRAJU NARENDRA V

1 patent

US8610223B2Dec 17, 2013

Embedded microelectromechanical systems sensor and related devices and methods

LAKAMRAJU NARENDRA V0 citations44