Inventor
FELLER DANIEL A
US8 patents
⚠️ This page may combine multiple inventors who share the name “FELLER DANIEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS6046099AApr 4, 2000
Plug or via formation using novel slurries for chemical mechanical polishing
INTEL CORP89 citations98
US5954975ASep 21, 1999
Slurries for chemical mechanical polishing tungsten films
INTEL CORP90 citations98
US5516346AMay 14, 1996
Slurries for chemical mechanical polishing
INTEL CORP106 citations98
US5340370AAug 23, 1994
Slurries for chemical mechanical polishing
INTEL CORP410 citations98
US6178585B1Jan 30, 2001
Slurries for chemical mechanical polishing
INTEL CORP25 citations95
US5836806ANov 17, 1998
Slurries for chemical mechanical polishing
INTEL CORP60 citations95
US6375552B1Apr 23, 2002
Slurries for chemical mechanical polishing
INTEL CORP18 citations92