Inventor
KAERIYAMA TOSHIYUKI
US22 patents
⚠️ This page may combine multiple inventors who share the name “KAERIYAMA TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
16 patentsUS6099132AAug 8, 2000
Manufacture method for micromechanical devices
TEXAS INSTRUMENTS INC233 citations99
US5646768AJul 8, 1997
Support posts for micro-mechanical devices
TEXAS INSTRUMENTS INC364 citations99
US5497262AMar 5, 1996
Support posts for micro-mechanical devices
TEXAS INSTRUMENTS INC137 citations99
US5485304AJan 16, 1996
Support posts for micro-mechanical devices
TEXAS INSTRUMENTS INC188 citations99
US5872046AFeb 16, 1999
Method of cleaning wafer after partial saw
TEXAS INSTRUMENTS INC116 citations98
US6053617AApr 25, 2000
Manufacture method for micromechanical devices
TEXAS INSTRUMENTS INC46 citations96
US6618186B2Sep 9, 2003
Micro-electromechanical system
TEXAS INSTRUMENTS INC40 citations92
US6150214ANov 21, 2000
Titanium nitride metal interconnection system and method of forming the same
TEXAS INSTRUMENTS INC40 citations92
US4855798AAug 8, 1989
Semiconductor and process of fabrication thereof
TEXAS INSTRUMENTS INC53 citations89
US6528835B1Mar 4, 2003
Titanium nitride metal interconnection system and method of forming the same
TEXAS INSTRUMENTS INC17 citations84
US5933726AAug 3, 1999
Method of forming a semiconductor device have a screen stacked cell capacitor
TEXAS INSTRUMENTS INC17 citations83
US6987601B2Jan 17, 2006
Damped control of a micromechanical device
TEXAS INSTRUMENTS INC10 citations74
US7692841B2Apr 6, 2010
System and method for regulating micromirror position
TEXAS INSTRUMENTS INC5 citations63
US5804034ASep 8, 1998
Method for manufacturing semiconductor device
TEXAS INSTRUMENTS INC5 citations63
US6077735AJun 20, 2000
Method of manufacturing semiconductor device
TEXAS INSTRUMENTS INC6 citations60
US6969649B2Nov 29, 2005
Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices
TEXAS INSTRUMENTS INC0 citations51
HITACHI LTD
5 patentsUS5804479ASep 8, 1998
Method for forming semiconductor integrated circuit device having a capacitor
HITACHI LTD58 citations95
US6060352AMay 9, 2000
Method of manufacturing semiconductor device with increased focus margin
HITACHI LTD16 citations83
US6753219B2Jun 22, 2004
Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices
HITACHI LTD8 citations73
US5937290AAug 10, 1999
Method of manufacturing semiconductor integrated circuit devices using phase shifting mask
HITACHI LTD8 citations73
US5933724AAug 3, 1999
Method of manufacturing a semiconductor integrated circuit device using a photomask in which transmitted light beam intensities are controlled
HITACHI LTD11 citations73