Inventor

KAWAMORITA SHINOBU

JP2 patents

Patents

2 patents

US11073851B2Jul 27, 2021

Monitoring apparatus of raw material tank and monitoring method of raw material tank

TOKYO ELECTRON LTD0 citations53

US10550471B2Feb 4, 2020

Mixed gas multiple line supply system and substrate processing apparatus using same

TOKYO ELECTRON LTD0 citations29