Inventor
HUH YUN-JUN
KR12 patents
⚠️ This page may combine multiple inventors who share the name “HUH YUN-JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SEMICON CO LTD
9 patentsUS6532976B1Mar 18, 2003
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD39 citations92
US6037205AMar 14, 2000
Method of forming capacitor for semiconductor device using N2 O gas
LG SEMICON CO LTD57 citations92
US5948173ASep 7, 1999
System and method for cleaning a semiconductor wafer
LG SEMICON CO LTD21 citations92
US5885360AMar 23, 1999
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD18 citations92
US5850841ADec 22, 1998
Cleaning apparatus of semiconductor device
LG SEMICON CO LTD34 citations92
US5788871AAug 4, 1998
Etch-ending point measuring method for wet-etch process
LG SEMICON CO LTD40 citations92
US5842491ADec 1, 1998
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD15 citations73
US6637443B2Oct 28, 2003
Semiconductor wafer cleaning apparatus and method
LG SEMICON CO LTD4 citations62
US5783099AJul 21, 1998
Etch-ending point measuring method for vapor etch process
LG SEMICON CO LTD5 citations62