Inventor

MUKUTA NOBUHIRO

JP2 patents

Patents

2 patents

US6807452B2Oct 19, 2004

Scheduling method and program for a substrate processing apparatus

DAINIPPON SCREEN MFG22 citations89

US6889105B2May 3, 2005

Scheduling method and program for a substrate processing apparatus

DAINIPPON SCREEN MFG30 citations86