Inventor

BAILEY III ANDREW

US4 patents

⚠️ This page may combine multiple inventors who share the name “BAILEY III ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM YUNSANG

2 patents

US8137501B2Mar 20, 2012

Bevel clean device

KIM YUNSANG6 citations70

US8500951B2Aug 6, 2013

Low-K damage avoidance during bevel etch processing

KIM YUNSANG3 citations60

LAM RES CORP

1 patent

US7718542B2May 18, 2010

Low-k damage avoidance during bevel etch processing

LAM RES CORP8 citations82

SEXTON GREG

1 patent

US8475624B2Jul 2, 2013

Method and system for distributing gas for a bevel edge etcher

SEXTON GREG5 citations65