Inventor

SCHAPENDONK PAULUS H C M

NL2 patents

Patents

2 patents

US6657204B2Dec 2, 2003

Cooling of voice coil motors in lithographic projection apparatus

ASML NETHERLANDS BV19 citations88

US7057313B2Jun 6, 2006

Cooling of voice coil motors

ASML NETHERLANDS BV10 citations69