Inventor

MURALI AMITH

US2 patents

⚠️ This page may combine multiple inventors who share the name “MURALI AMITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US7479191B1Jan 20, 2009

Method for endpointing CVD chamber cleans following ultra low-k film treatments

NOVELLUS SYSTEMS INC20 citations87

KLA TENCOR TECH CORP

1 patent

US7436505B2Oct 14, 2008

Computer-implemented methods and systems for determining a configuration for a light scattering inspection system

KLA TENCOR TECH CORP12 citations80