Inventor
ROH CHI HYEONG
KR10 patents
⚠️ This page may combine multiple inventors who share the name “ROH CHI HYEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYUNDAI ELECTRONICS IND
9 patentsUS6316162B1Nov 13, 2001
Polymer and a forming method of a micro pattern using the same
HYUNDAI ELECTRONICS IND482 citations99
US6225020B1May 1, 2001
Polymer and a forming method of a micro pattern using the same
HYUNDAI ELECTRONICS IND508 citations99
US6987155B2Jan 17, 2006
Polymers for photoresist and photoresist compositions using the same
HYUNDAI ELECTRONICS IND463 citations98
US6569971B2May 27, 2003
Polymers for photoresist and photoresist compositions using the same
HYUNDAI ELECTRONICS IND473 citations98
US6150069ANov 21, 2000
Oxabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same
HYUNDAI ELECTRONICS IND50 citations96
US6316565B1Nov 13, 2001
Amide- or imide-introduced copolymer, preparation thereof and a photoresist comprising the same
HYUNDAI ELECTRONICS IND27 citations92
US6045967AApr 4, 2000
Method and device using ArF photoresist
HYUNDAI ELECTRONICS IND32 citations91
US6291131B1Sep 18, 2001
Monomers for photoresist, polymers thereof, and photoresist compositions using the same
HYUNDAI ELECTRONICS IND18 citations84
US6416926B1Jul 9, 2002
Thiabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same
HYUNDAI ELECTRONICS IND8 citations74