Inventor
BUTSCH RAINER
US3 patents
Patents
3 patentsUS5798528AAug 25, 1998
Correction of pattern dependent position errors in electron beam lithography
IBM28 citations90
US5916716AJun 29, 1999
Emulation methodology for critical dimension control in E-Beam lithography
IBM16 citations71
US5838013ANov 17, 1998
Method for monitoring resist charging in a charged particle system
IBM1 citations50