Inventor
OHMI KAZUAKI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “OHMI KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
35 patentsUS6624047B1Sep 23, 2003
Substrate and method of manufacturing the same
CANON KK150 citations99
US6468923B1Oct 22, 2002
Method of producing semiconductor member
CANON KK144 citations98
US6426270B1Jul 30, 2002
Substrate processing method and method of manufacturing semiconductor substrate
CANON KK82 citations98
US6391743B1May 21, 2002
Method and apparatus for producing photoelectric conversion device
CANON KK88 citations98
US6382292B1May 7, 2002
Method and apparatus for separating composite member using fluid
CANON KK97 citations98
US6342433B1Jan 29, 2002
Composite member its separation method and preparation method of semiconductor substrate by utilization thereof
CANON KK96 citations98
US6376332B1Apr 23, 2002
Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method
CANON KK93 citations97
US6656271B2Dec 2, 2003
Method of manufacturing semiconductor wafer method of using and utilizing the same
CANON KK74 citations96
US6605518B1Aug 12, 2003
Method of separating composite member and process for producing thin film
CANON KK63 citations96
US6140209AOct 31, 2000
Process for forming an SOI substrate
CANON KK69 citations96
US5563092AOct 8, 1996
Method of producing a substrate for an amorphous semiconductor
CANON KK86 citations96
US6746559B2Jun 8, 2004
Method and apparatus for separating composite member using fluid
CANON KK33 citations93
US6672358B2Jan 6, 2004
Sample processing system
CANON KK33 citations93
US6653205B2Nov 25, 2003
Composite member separating method, thin film manufacturing method, and composite member separating apparatus
CANON KK35 citations93
US6629539B1Oct 7, 2003
Sample processing system
CANON KK25 citations93
US6597039B2Jul 22, 2003
Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof
CANON KK35 citations93
US6527031B1Mar 4, 2003
Sample separating apparatus and method, and substrate manufacturing method
CANON KK31 citations93
US6475323B1Nov 5, 2002
Method and apparatus for separating composite member using fluid
CANON KK33 citations93
US6127692AOct 3, 2000
Photoelectric conversion apparatus
CANON KK32 citations93
US5723877AMar 3, 1998
Photoelectric conversion apparatus
CANON KK31 citations93
US5500102AMar 19, 1996
Method of forming deposited semiconductor film
CANON KK32 citations93
US5154949AOct 13, 1992
Process for forming metal deposited film containing aluminum as main component by use of alkyl aluminum hydride
CANON KK27 citations93
US6979629B2Dec 27, 2005
Method and apparatus for processing composite member
CANON KK18 citations92
US6900114B2May 31, 2005
Separating apparatus, separating method, and method of manufacturing semiconductor substrate
CANON KK20 citations92
US6653206B2Nov 25, 2003
Method and apparatus for processing composite member
CANON KK21 citations92
US5776255AJul 7, 1998
Chemical vapor deposition apparatus
CANON KK43 citations92
US4931692AJun 5, 1990
Luminescing member, process for preparation thereof, and electroluminescent device employing same
CANON KK38 citations92
US6971432B2Dec 6, 2005
Sample processing system
CANON KK5 citations74
US6025243AFeb 15, 2000
Method for preparing a semiconductor device
CANON KK11 citations74
US5723034AMar 3, 1998
Process for forming hydrogenated amorphous silicon film
CANON KK10 citations74
US5134092AJul 28, 1992
Process for forming deposited film and process for producing semiconductor device
CANON KK8 citations74
US6609446B1Aug 26, 2003
Separating apparatus, separating method, and method of manufacturing semiconductor substrate
CANON KK9 citations73
US5182253AJan 26, 1993
Purification apparatus for superconductor fine particles
CANON KK12 citations72
US7077901B2Jul 18, 2006
Process for producing single crystal silicon wafers
CANON KK4 citations63
US8035668B2Oct 11, 2011
Exposure apparatus and device manufacturing method
CANON KK1 citations51